Non-Contact Thickness Measuring System

THS
THS series is a non-contact thickness/height/depth measuring system based on an optical type focal point detection method, incorporating the two microscope optical systems of the top and bottom, with precise focus indicator using index graticule. Thickness can be measured up to 10mm with observing the surface of measuring point. Because of an optical system, operations are simple, and the precise focus indicator (Target Mark) can be seen on a monitor at a just focus condition. 

THS-10 Manual Type

THS-20 Automatic Type

THS-30 Full Automatic Type
THS-10 Manual Type THS-20 Automatic Type THS-30 Full Automatic Type
Z-axis movement of top and bottom optical systems are operated manually, and thickness measurements are performed on a monitor screen. Measurement resolution is 1μm as standard, and 0.1μm as option.

THS-20 is an automatic system combining auto focus and pulse stage.
X, Y or Z coordinate position, pitch feed, etc. by pulse motor drive are measured in sequential operation. Adopting image processing auto focus, high-reliable repeatability is achieved without individual differences. Also incorporating leading-edge technology, user-friendliness has been improved by Windows' base user interface.
(user-friendliness improved by Windows version)
THS-30 is a full automatic measuring system for regular wafers, incorporating wafer loader/unloader unit with pre-aligner, and orientation flat alignment unit, in addition to the existing functions of THS-20.
(user-friendliness improved by Windows version)

Specifications

 

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THS-10 THS-20 THS-30
Measuring area X:100mm Y:100mm X:100mm Y:100mm X:100mm Y:100mm
Measuring time
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6 - 8 sec/point 6 - 8 sec/point
Resolution 1μm(0.1μm option) 0.1μm 0.1μm
Repeatability - 1σ=0.5μm(testing block gauge) 1σ=0.5μm(testing block gauge)
Stage Manual traveling, X,Y reading by linear scale, Min 1μm reading Travel by pulse motor, move to coordinate position, pitch feed movement available,
4 kinds of modes available
Travel by pulse motor, move to coordinate position, pitch feed movement available,
4 kinds of modes available
Carrier system - - Automatically load/unload wafer cassette to cassette
Detector for Orientation Flat - - Detect the position of orientation flat

 

     

     

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